Sulfur Hexafluoride
High-purity sulfur hexafluoride
Air Liquide manufactures sulfur hexafluoride pure gas with purity up to 99.999% or as part of aScott™ brand specialty gas mixture with air or nitrogen. Sulfur hexafluoride is used in many applications, including dielectric, heat insulation and plasma etching in semiconductor manufacturing. Sulfur hexafluoride in a balance of nitrogen is an excellent trace gas for use with instruments dedicated to detection of minor components.
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